ANALYSIS OF THE EFFECT OF SOLUTION CHARACTERISTICS ON THE ELECTROPHYSICAL PARAMETERS OF TRANSPARENT CONDUCTIVE OXIDES 

Timur O. Zinchenko, Postgraduate student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: scar0243@gmail.com
Ekaterina A. Pecherskaya, Doctor of technical sciences, associate professor, head of sub-department of information and measuring equipment and metrology, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: pea1@list.ru
Gennady V. Kozlov, Doctor of technical sciences, professor, director of the polytechnic institute, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: gvk17@yandex.ru
Vladislav I. Kondrashin, General director, LLC "Paradigma" (51 Kirova street, Penza, Russia), E-mail: vlad_kondrashin@mail.ru
Yuriy A. Varenik, Candidate of technical sciences, associate professor, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: yurik_ru@mail.ru
Vladimir S. Alexandrov, Student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: vsalexrus@gmail.com 

684.4.05 

10.21685/2307-5538-2021-3-9 

Background. The aim of the study is to analyze the effect of the solution parameters on the electrophysical parameters of transparent conducting oxides during their synthesis by spray pyrolysis. Materials and methods. In the considered technology for the synthesis of transparent conductive oxides by spray pyrolysis, the method of hydrolysis of solutions of chlorine tin is used. It is convenient for testing and selecting the amount and type of alloying additives to SnO2. The formation of the oxide film is carried out on the heated surface of the substrate by surface hydrolysis of metal chloride. Results. It is shown that one of the important quality parameters of transparent conducting oxides (resistivity, and hence conductivity) is significantly affected by the characteristics of the solution (volume, impurity and its concentration, precursors and their concentration). Conclusions. The results of the experiments and their analysis confirmed that in order to reduce the surface resistance of PPO, it is necessary to increase the volume of the solution, the concentration of antimony impurities, and the concentration of precursors. Antimony atoms, replacing tin atoms in the lattice, are donors and lead to the formation of excess free electrons and an increase in conductivity. 

solution parameters, tin tetrachloride pentahydrate, antimony trichloride, precursor, impurity, resistivity, conductivity